Reactive ion etching related Si surface residues and subsurface damage: Their relationship to fundamental etching mechanisms
- Gottiieb S. Oehrlein
- Young H. Lee
- 1987
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
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- Materials Discovery
3485 results for Materials Discovery
Summary Abstract: Chernisorption of silanes on the Si(111)-(7x7) surface
- S. Gates
- B.A. Scott
- et al.
- 1987
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Investigation of inas and gasb by high-resolution electron energy-loss spectroscopy
- P.A. Thiry
- J.L. Longueville
- et al.
- 1987
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Summary abstract: On the quantitative aspects of oxygen enhancement in secondary ion mass spectrometry
- Ming L. Yu
- 1987
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Charge transport in magnetrons
- S.M. Rossnagel
- H.R. Kaufman
- 1987
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Imaging electronic surface states in real space on the Si(111) 2x1 surface
- Joseph A Stroscio
- R.M. Feenstra
- et al.
- 1987
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Dynamics of gas-surface energy transfer: Inelastic scattering of NO from Ag(111)
- C.T. Rettner
- J. Kimman
- et al.
- 1987
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Surface characterization of clean polyimide films by high-resolution electron energy-loss spectroscopy
- T.C. Clarke
- C. Gregoire
- et al.
- 1987
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Surface structures for the O/Ni(001) system from c(2x2)0 to saturated nio
- C.R. Brundle
- A. Kaduwela
- et al.
- 1987
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
NEXAFS studies of complex alcohols and carboxylic acids on the Si(111)(7×7) surface
- D.A. Outka
- J. Stöhr
- et al.
- 1987
- Surface Science