Monitoring the Growth of an Oxide Film on Aluminum In Situ with the Quartz Crystal Microbalance
- Owen R. Melroy
- 2019
- JES
Publications
509 results at JES
Application of Chemical and Electrochemical Micromachining in the Electronics Industry
- Madhav Datta
- Lubomyr T. Romankiw
- 2019
- JES
Etch Selectivity of Silicon Dioxide over Titanium Silicide Using CF4/H2 Reactive Ion Etching
- Steve W. Robey
- Gottlieb S. Oehrlein
- 2019
- JES
PtSi-Induced Junction Leakage
- J.P. Gambino
- M.D. Monkowski
- et al.
- 2019
- JES
Chemical Vapor Deposition of Epitaxial Silicon from Silane at Low Temperatures: I. Very Low Pressure Deposition
- James H. Comfort
- Rafael Reif
- 2019
- JES
Dopant Segregation in CZ and MCZ Silicon Crystal Growth: A Comparison Between Experiment and Numerical Simulation
- K.M. Kim
- W.E. Langlois
- 2019
- JES
MS Studies of Anodic Surface Films on Copper Electrodes
- Joseph G. Gordon IIW
- 2019
- JES
A new process using two photo-masks to prepare trilayer thin film transistors
- Yue Kuo
- 2019
- JES
A Novel Scheme for Detection of Defects in III-V Semiconductors by Cathodoluminescence
- Larry M. Glassman
- Martin P. Scott
- 2019
- JES
Inhibition of Silicon Oxidation During Low Temperature Epitaxial Growth
- P.D. Agnelle
- T.O. Sedgwick
- 2019
- JES