Impact of high-NA half-field to full-field overlay performance by Monte Carlo simulations
- Romain Lallement
- Daniel Schmidt
- et al.
- 2023
- OEN 2023
Publications
3593 results for Mathematical Sciences
Methodology Development to Benchmark Power Delivery Designs in Advanced Technology Nodes
- Nicholas A. Lanzillo
- A. Chu
- et al.
- 2023
- SPIE Advanced Lithography + Patterning 2023
The evolution of heterogeneous integration and packaging for the age of chiplets
- Spyridon Skordas
- 2023
- MEMS/NEMS/MOEMS 2023
Overlay Performance in Permanent Bonded Wafer Integration Schemes
- Nathan Ip
- Michael Belyansky
- et al.
- 2023
- SPIE Advanced Lithography + Patterning 2023
EUV sub-resolution assist feature impact: experimental and simulation evaluation
- Zheng Chen
- Martin Burkhardt
- et al.
- 2023
- OEN 2023
When Machine Learning meets Dynamical Systems: Theory and Applications
- Lam Nguyen
- Trang H. Tran
- et al.
- 2023
- AAAI 2023
Knowledge-augmented Risk Assessment (KaRA): a hybrid-intelligence framework for supporting knowledge-intensive risk assessment of prospect candidate
- Carlos Raoni De Alencar Mendes
- Emilio Ashton Vital Brazil
- et al.
- 2023
- AAAI 2023
Optimization with Constraint Learning
- S. Ilker Birbil
- Donato Maragno
- et al.
- 2023
- AAAI 2023
A Decentralized Primal-Dual Framework for Non-convex Smooth Consensus Optimization
- Gabriel Mancino-ball
- Yangyang Xu
- et al.
- 2023
- IEEE TSP
On some algorithmic aspects of hypergraphic matroids
- Mourad Baiou
- Francisco Barahona
- 2023
- Discrete Mathematics