Resist freezing process for double exposure lithography
- Kuang-Jung Rex Chen
- Wu-Song Huang
- et al.
- 2008
- SPIE Advanced Lithography 2008
Conference paper
Publications
14468 results for Physical Sciences
Supramolecular assembly of block copolypeptides with semiconductor nanocrystals
- Bayu Atmaja
- Jennifer N. Cha
- et al.
- 2008
- Langmuir
PaperFacile postpolymerization end-modification of RAFT polymers
- Jason M. Spruell
- Benjamin A. Levy
- et al.
- 2008
- J Polym Sci Part A
PaperThin film nanotube transistors based on self-assembled, aligned, semiconducting carbon nanotube arrays
- Michael Engel
- Joshua P. Small
- et al.
- 2008
- ACS Nano
PaperNickel silicides and germanides: Phases formation, kinetics and thermal expansion
- C. Perrin
- D. Mangelinck
- et al.
- 2008
- Materials Science and Engineering: B
PaperApplication of block-copolymer supramolecular assembly for the fabrication of complex TiO2 nanostructures
- Sung Ho Kim
- Oun-Ho Park
- et al.
- 2008
- Small
PaperCharge transport through a cardan-joint molecule
- Mario Ruben
- Aitor Landa
- et al.
- 2008
- Small
PaperThermal stress effects of Ge2Sb2Te5 phase change material: Irreversible modification with Ti adhesion layers and segregation of Te
- K.N. Chen
- C. Cabral Jr.
- et al.
- 2008
- Microelectronic Engineering
PaperFluorinated diamondlike carbon templates for high resolution nanoimprint lithography
- M. Schvartzman
- A. Mathur
- et al.
- 2008
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
PaperSi-containing block copolymers for self-assembled nanolithography
- C.A. Ross
- Y.S. Jung
- et al.
- 2008
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Paper