Transient fluorocarbon film thickness effects near the silicon dioxide/silicon interface in selective silicon dioxide reactive ion etching
- Mark A. Jaso
- Gottlieb S. Oehrlein
- 1988
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Publications
3514 results for Materials Discovery
Magnetotransport and cyclotron resonance in AlAs quantum wells
- T.P. Smith III
- W.I. Wang
- et al.
- 1988
- Surface Science
Theory of the local tunneling spectrum of a vibrating adsorbate
- A. Baratoff
- B.N.J. Persson
- 1988
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Adhesion and interface investigation of polyimide on metals
- Y.-H. Kim
- J. Kim
- et al.
- 1988
- Journal of Adhesion Science and Technology
Studies of superconductors using a low-temperature, high-field scanning tunneling microscope
- J.R. Kirtley
- R.M. Feenstra
- et al.
- 1988
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Effect of substrate preparation on the structure and chemisorption properties of Pd/MgO model catalyst
- C.R. Henry
- H. Poppa
- 1988
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Summary Abstract: Imaging oxygen acceptor states on the GaAs(110) surface
- Joseph A. Stroscio
- R.M. Feenstra
- 1988
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Summary Abstract: Desorption dynamics of SiF4etch product
- F.A. Houle
- 1988
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Control of microstructure and properties of copper films using ion-assisted deposition
- R.A. Roy
- J.J. Cuomo
- et al.
- 1988
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Theory of ripple topography induced by ion bombardment
- R.Mark Bradley
- James M.E. Harper
- 1988
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films