Gas/surface reactions in the chemical vapor deposition of tungsten using WF6/SiH4mixtures
- Ming L. Yu
- Benjamin N. Eldridge
- 1989
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Publications
358 results at Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Microstructure and properties of dual ion beam sputtered tungsten film
- A.S. Kao
- V. Novotny
- et al.
- 1989
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Optical emission in magnetrons: Nonlinear aspects
- S.M. Rossnagel
- K.L. Saenger
- 1989
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Summary Abstract: Applications of surface science in circuitboard manufacture
- C.R. Brundle
- 1988
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Plasma studies on the Leybold-Heraeus INA3 secondary neutral mass spectrometry system
- A. Wucher
- 1988
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Theoretical scanning tunneling microscopy and atomic force microscopy study of graphite including tip-surface interaction
- Inder P. Batra
- S. Ciraci
- 1988
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Oxidation of a cobalt chromium alloy: An x-ray photoemission spectroscopy study
- David E. Fowler
- Juergen Rogozik
- 1988
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Deposition and redeposition in magnetrons
- S.M. Rossnagel
- 1988
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Summary Abstract: Coadsorbate induced ordering on Rh(111) and Rh(100) surfaces: Structural and chemical effects
- C.-T. Kao
- C.M. Mate
- et al.
- 1988
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Summary Abstract: The role of interface states on Schottky behavior
- G. Jezequel
- A. Taleb-lbrahimi
- et al.
- 1988
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films