Surface analysis of realistic semiconductor microstructures
- Gottlieb S. Oehrlein
- Kevin K. Chan
- et al.
- 1989
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Publications
Date
Featured collections
Popular topics
357 results at Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
A comparison between aluminum and copper interactions with high-temperature oxide and nitride diffusion barriers
- A. Charai
- S.E. Harnstram
- et al.
- 1989
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Deposition and redeposition in magnetrons
- S.M. Rossnagel
- 1988
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Oxidation of a cobalt chromium alloy: An x-ray photoemission spectroscopy study
- David E. Fowler
- Juergen Rogozik
- 1988
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Theoretical scanning tunneling microscopy and atomic force microscopy study of graphite including tip-surface interaction
- Inder P. Batra
- S. Ciraci
- 1988
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Summary Abstract: Coadsorbate induced ordering on Rh(111) and Rh(100) surfaces: Structural and chemical effects
- C.-T. Kao
- C.M. Mate
- et al.
- 1988
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Summary Abstract: The barrier to oxygen penetration on transition-metal oxide surfaces
- Peter Nordlander
- Maria Ronay
- 1988
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Plasma studies on the Leybold-Heraeus INA3 secondary neutral mass spectrometry system
- A. Wucher
- 1988
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Proposal for a novel gravitational-wave sensor
- M. Niksch
- G. Binnig
- 1988
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Growth of epitaxial CaSi2 films on Si(111)
- J.F. Morar
- M. Wittmer
- 1988
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films