Investigation of Reactive-Ion-Etching-Related Fluorocarbon Film Deposition onto Silicon and a New Method for Surface Residue Removal
- G.S. Oehrlein
- J.G. Clabes
- et al.
- 2019
- JES
Paper
Publications
509 results at JES
Pairing Effects in the Luminescence Spectrum of Zn2SiO4:Mn
- E.E. Mendez
- E.A. Giess
- et al.
- 2019
- JES
PaperSidewall Spacer Technology for MOS and Bipolar Devices
- Sang H. Dhong
- Edward J. Petrillo
- 2019
- JES
PaperComparison of the Activity of PdSn Colloidal Catalysts with the Activity of Pure Metals for HCHO Oxidation: Enhancement of the Activity by Ionic Tin
- Jean Horkans
- 2019
- JES
PaperAnalysis of Coincidence Losses for a Monitor of Particle Contamination on Surfaces
- Douglas W. Cooper
- Robert J. Miller
- 2019
- JES
PaperThe Kinetics of Palladium Reduction at Particulate TiO2 Photocatalysts
- E.J.M. O'Sullivan
- 2019
- JES
PaperCombined Experimental and Modeling Study of Spatial Effects in Plasma Etching: CF4/O2 Etching of Silicon
- M. Dalvie
- K.F. Jensen
- 2019
- JES
PaperDetermination of partial currents for cuni and cuco electrodeposition using rotating ring-disk electrodes
- Jean Horkans
- I-Chia Hsu Chang
- et al.
- 2019
- JES
PaperAcceleration Factors for the Decomposition of Thermally Grown SiO2 Films
- S.I. Raider
- 2019
- JES
PaperReactive Ion Etching in SF6 Gas Mixtures
- R. Pinto
- R.S. Babu
- 2019
- JES
Paper