Optimization of Electrodeposit Uniformity by the Use of Auxiliary Electrodes
- S. Mehdizadeh
- J. Dukovic
- et al.
- 2019
- JES
Publications
509 results at JES
Low Energy Proton Beam Lithography with a Thin Oxygen-Etch Barrier Layer
- H. Hiraoka
- 2019
- JES
Acceleration Factors for the Decomposition of Thermally Grown SiO2 Films
- S.I. Raider
- 2019
- JES
Investigation of Reactive-Ion-Etching-Related Fluorocarbon Film Deposition onto Silicon and a New Method for Surface Residue Removal
- G.S. Oehrlein
- J.G. Clabes
- et al.
- 2019
- JES
Sidewall Spacer Technology for MOS and Bipolar Devices
- Sang H. Dhong
- Edward J. Petrillo
- 2019
- JES
Analysis of Coincidence Losses for a Monitor of Particle Contamination on Surfaces
- Douglas W. Cooper
- Robert J. Miller
- 2019
- JES
The Influence of Attached Bubbles on Potential Drop and Current Distribution at Gas-Evolving Electrodes
- Charles W. Tobias
- 2019
- JES
A Novel Scheme for Detection of Defects in III-V Semiconductors by Cathodoluminescence
- Larry M. Glassman
- Martin P. Scott
- 2019
- JES
Combined Experimental and Modeling Study of Spatial Effects in Plasma Etching: CF4/O2 Etching of Silicon
- M. Dalvie
- K.F. Jensen
- 2019
- JES
Reactive Ion Etching in SF6 Gas Mixtures
- R. Pinto
- R.S. Babu
- 2019
- JES