Reactive ion etching of plasma enhanced chemical vapor deposition amorphous silicon and silicon nitride: Feeding gas effects
- Yue Kuo
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Paper
Publications
3555 results for Materials Discovery
Bonding at silicon/insulator interfaces
- F.J. Himpsel
- T.F. Heinz
- et al.
- 1990
- Applied Surface Science
PaperThe effect of solvent absorption on the electrical and dielectric properties of polyimide films
- D.Y. Shih
- J. Cataldo
- et al.
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperMolecular beam studies of trapping dynamics
- W.H. Weinberg
- C.B. Mullins
- et al.
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperThe effect of the interfacial strength on the mechanical properties of aluminum films
- T.W. Wu
- M. Moshref
- et al.
- 1990
- Thin Solid Films
PaperThe Si(001)/SiO2 interface
- A. Ourmazd
- P.H. Fuoss
- et al.
- 1990
- Applied Surface Science
PaperFundamental experimental studies in tribology: The transition from "interfacial" friction of undamaged molecularly smooth surfaces to "normal" friction with wear
- Andrew M. Homola
- Jacob N. Israelachvili
- et al.
- 1990
- Wear
PaperX-ray photoelectron spectroscopy and ellipsometry studies of the electrochemically controlled adsorption of benzotriazole on copper surfaces
- S.L. Cohen
- V. Brusic
- et al.
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperDynamics of the interaction of ethane with lr(110)-(1 x2)
- W.H. Weinberg
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperEpitaxial growth of silicon on Si(001) by scanning tunneling microscopy
- R.J. Hamers
- J.E. Demuth
- et al.
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Paper