Theory of plasma chemical transport etching of gold in a chlorine plasma
- C.B. Zarowin
- 1981
- Thin Solid Films
Publications
Date
Featured collections
Popular topics
310 results at Thin Solid Films
Plasma oxidation of silicon
- A. Ray
- 1981
- Thin Solid Films
Germanide formation by thermal treatment of platinum films deposited on single-crystal Ge〈100〉 substrates
- M.G. Grimaldi
- L. Wieluński
- et al.
- 1981
- Thin Solid Films
Metal-containing fluoropolymer films produced by simultaneous plasma etching and polymerization: The series of perfluoroalkanes nF2n+2 (n = 1,2,3,4)
- E. Kay
- A. Dilks
- 1981
- Thin Solid Films
Thermal strain in lead thin films VI: Effects of oxygen doping
- Masanori Murakami
- 1980
- Thin Solid Films
High resolution X-ray diffraction from small numbers of Langmuir-Blodgett layers of manganese stearate
- M. Pomerantz
- Armin Segmüller
- 1980
- Thin Solid Films
Materials analysis of thin film transistors
- B.D. Chase
- G.C.S. Collins
- et al.
- 1980
- Thin Solid Films
Thermal reactions between aluminum and palladium layered films
- U. Köster
- P.S. Ho
- et al.
- 1980
- Thin Solid Films
Thermal strain in lead thin films V: Strain relaxation above room temperature
- M. Murakami
- T.S. Kuan
- 1980
- Thin Solid Films
Diffusion processes in thin films
- D. Gupta
- P.S. Ho
- 1980
- Thin Solid Films