Slope control of molybdenum lines etched with reactive ion etching
- Yue Kuo
- J.R. Crowe
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Paper
Publications
3555 results for Materials Discovery
Surface photovoltage on Si(111)-(7x7) probed by optically pumped scanning tunneling microscopy
- R.J. Hamers
- K. Markert
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperHigh-temperature crystal structures of orthorhombic and rhombohedral PrNiO3
- T.C. Huang
- W. Parrish
- et al.
- 1990
- Materials Research Bulletin
PaperPlasma induced gas heating in electron cyclotron resonance sources
- S.M. Rossnagel
- S.J. Whitehair
- et al.
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperSi2Cl6and Si2H6adsorption on CaF2/Si(111)
- L.J. Terminello
- F.J. Himpsel
- et al.
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperSputtered tungsten for deep submicroncomplementary metal-oxide-semiconductor technology
- L. Dori
- A.C. Megdanis
- et al.
- 1990
- Thin Solid Films
PaperEffects of interfacial microstructure on ohmic contacts to GaAs
- Masanori Murakami
- H.-J. Kim
- et al.
- 1990
- Applied Surface Science
PaperSurface intervalley scattering on GaAs(110) studied with picosecond laser photoemission
- R. Haight
- J.A. Silberman
- 1990
- Applied Surface Science
PaperIn situ plasma contamination measurements by HeNe laser light scattering: A case study
- J.S. Mckillop
- Kurt L. Haller
- et al.
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperHigh rate radio frequency sputtering using in-phase plasma confinement
- James E. Lucy
- John Costable
- et al.
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Paper