Comparison of left and right side line edge roughness in lithography
- Lei Sun
- Nicole Saulnier
- et al.
- 2016
- SPIE Advanced Lithography 2016
Publications
Date
Featured collections
Popular topics
3490 results for Mathematical Sciences
Towards production ready processing with a state-of-the-art EUV cluster
- Karen Petrillo
- Nicole Saulnier
- et al.
- 2015
- SPIE Advanced Lithography 2015
EUV processing and characterization for BEOL
- Nicole Saulnier
- Yongan Xu
- et al.
- 2015
- SPIE Advanced Lithography 2015
Graphene plasmons: Properties and applications
- Phaedon Avouris
- Damon B. Farmer
- et al.
- 2014
- SPIE Nanoscience + Engineering 2014
Approximate matrix multiplication with application to linear embeddings
- Anastasios Kyrillidis
- Michail Vlachos
- et al.
- 2014
- ISIT 2014
Partial MDS (PMDS) and Sector-Disk (SD) codes that tolerate the erasure of two random sectors
- Mario Blaum
- James S. Plank
- et al.
- 2014
- ISIT 2014
Enumerative modulation codes based on sliding-window substitutions
- Thomas Mittelholzer
- Roy D. Cideciyan
- 2014
- ISIT 2014
Active odor cancellation
- Kush R. Varshney
- Lav R. Varshney
- 2014
- SSP 2014
Multiplicative regression via constrained least squares
- Dennis Wei
- Karthikeyan Natesan Ramamurthy
- et al.
- 2014
- SSP 2014
Computing persistent homology under random projection
- Karthikeyan Natesan Ramamurthy
- Kush R. Varshney
- et al.
- 2014
- SSP 2014