Publications

358 results at Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Roughness and porosity characterization of carbon and magnetic films through adsorption isotherm measurements
- - C.L. Wang
  - M.F. Toney
- 1989
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
A He and Ne diffraction study of the W(100) phase transition
- - E. Schweizer
  - C.T. Rettner
- 1989
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
interface states and Schottky barrier formation at metal/GaAs junctions
- - R.E. Viturrc
  - C. Mailhiot
  - et al.
- 1989
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
The chemical interaction of Mn with the MoS2(0001) surface studied by high-resolution photoelectron spectroscopy
- - Jeffrey R. Lince
  - Thomas B. Stewart
  - et al.
- 1989
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Competitive reactions of fluorine and oxygen with W, WSi2, and Si surfaces in reactive ion etching using CF4/O2
- - Gottlieb S. Oehrlein
  - J. Lennart Lindsöm
- 1989
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Optical emission in magnetrons: Nonlinear aspects
- - S.M. Rossnagel
  - K.L. Saenger
- 1989
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Surface analysis of realistic semiconductor microstructures
- - Gottlieb S. Oehrlein
  - Kevin K. Chan
  - et al.
- 1989
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
A process for improved Al (Cu) reactive ion etching
- - C.-K. Hu
  - B. Canney
  - et al.
- 1989
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
A comparison between aluminum and copper interactions with high-temperature oxide and nitride diffusion barriers
- - A. Charai
  - S.E. Harnstram
  - et al.
- 1989
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Mixed-metal-oxide planar optical waveguides
- - G. Arjavalingam
  - Michael A. Russak
  - et al.
- 1989
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films