Rastered laser light scattering studies during plasma processing: Particle contamination trapping phenomena
- Gary S. Selwyn
- J. Heidenreich
- et al.
- 1991
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Publications
3527 results for Materials Discovery
Two-dimensional imaging of photofragments and species desorbed from surfaces: Energy and angle resolved studies
- T.J. Chuang
- R. Schwarzwald
- et al.
- 1991
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Ion-beam sputtered diamond-like carbon with densities of 2.9 g/cc
- Jerome J. Cuomo
- John Bruley
- et al.
- 1991
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Thermal stress-induced and electromigration-induced void-open failures in Al and Al-Cu fine lines
- T. Kwok
- K.K. Chan
- et al.
- 1991
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
The effects of substrate bias on plasma parameters in an electron cyclotron resonance plasma reactor
- John B.O. Caughman
- William M. Holber
- 1991
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Stress and thermal expansion of boron-doped silicon membranes on silicon substrates
- B.S. Berry
- W.C. Pritchet
- 1991
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Surface etching and roughening in integrated processing of thermal oxides
- M. Offenberg
- M. liehr
- et al.
- 1991
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Characterization of epitaxial thin films by x-ray diffraction
- Armin Segmuller
- 1991
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
X-ray photoelectron spectroscopy of oxygen adsorbates on Al(111): Theory experiment
- P.S. Baqus
- F. Parmiqiani
- et al.
- 1991
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Thermal, mechanical and chemical effects in the degradation of the plasma-deposited α-SiC:H passivation layer in a multilayer thin-film device
- L.S. Chang
- P. Gendler
- et al.
- 1991
- Journal of Materials Science