Regression Optimization For System-level Production Control
- Dzung Phan
- Lam Nguyen
- et al.
- 2020
- INFORMS 2020
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3490 results for Mathematical Sciences
A Topological Data Analysis Approach on Predicting Phenotypes from Gene Expression Data
- Sayan Mandal
- Aldo Guzmán-Sáenz
- et al.
- 2020
- AICoB 2020
The defect mitigation on EUV stack by track based technology
- Naoki Shibata
- Lior Huli
- et al.
- 2019
- SPIE Advanced Lithography 2019
Track based techniques to improve high-resolution EUV patterning defectivity
- Naoki Shibata
- Lior Huli
- et al.
- 2018
- EUVL 2018
The integration of 193i and DSA for BEOL metal cuts/blocks targeting sub-20nm tip-to-tip CD
- Chi-Chun Liu
- Yann Mignot
- et al.
- 2018
- SPIE Advanced Lithography 2018
Coater/developer based techniques to improve high-resolution EUV patterning defectivity
- Koichi Hontake
- Lior Huli
- et al.
- 2017
- SPIE Photomask Technology + EUV Lithography 2017
Generalization for Adaptively-chosen Estimators via Stable Median
- Vitaly Feldman
- Thomas Steinke
- 2017
- COLT 2017
On optimal portfolios of dynamic resource allocations
- Yingdong Lu
- Siva Theja Maguluri
- et al.
- 2017
- ACC 2017
Overlay statistics for multiple exposure patterning
- 2017
- SPIE Advanced Lithography 2017
Advanced in-line metrology strategy for self-aligned quadruple patterning
- Robin Chao
- Mary Breton
- et al.
- 2016
- SPIE Advanced Lithography 2016