New Photoacid Generators Designed for Advanced EUV Patterning
- Kamal P. Pandey
- Emad Aqad
- et al.
- 2025
- SPIE Advanced Lithography 2025
Conference paper
Publications
9268 results for Computer Science
Commercialization of Non-PFAS KrF and Development of Non-PFAS EUV Photoresists
- Cong Liu
- Joseph Lachowski
- et al.
- 2025
- SPIE Advanced Lithography 2025
Conference paperEffect of Composition Uniformity in the Polymer Chain of EUV Photoresist on Lithographic Performance
- EuiJin Ko
- YooRim Jang
- et al.
- 2025
- SPIE Advanced Lithography 2025
Conference paperConsideration on segregation behavior of the surface localization material and the pattern roughness degradation in EUV lithography
- KwangMo Choi
- YunJi Kim
- et al.
- 2025
- SPIE Advanced Lithography 2025
Conference paperThe Impact of Polymer Compositional Homogeneity on Lithography and Defects
- Benjamin D. Rafael-Naab
- Jong Keun Park
- et al.
- 2025
- SPIE Advanced Lithography 2025
Conference paperThe inherent adversarial robustness of analog in-memory computing
- Corey Lammie
- Julian Büchel
- et al.
- 2025
- Nature Communications
PaperDesign and Evaluation of an AI-Assisted Grading Tool for Introductory Programming Assignments: An Experience Report
- Goda Nagakalyani
- Saurav Chaudhary
- et al.
- 2025
- SIGCSE 2025
Conference paperMULTI-STRUCTURAL GAMES AND NUMBER OF QUANTIFIERS
- Ronald Fagin
- Jonathan Lenchner
- et al.
- 2025
- Logical Methods in Computer Science
PaperHybrid Tree Tensor Networks for Quantum Simulation
- Julian Schuhmacher
- Marco Ballarin
- et al.
- 2025
- PRX Quantum
PaperLaser annealing for scalable frequency control on multi-qubit quantum processors
- 2025
- SPIE Photonics West 2025
Conference paper