A vibration resistant nanopositioner for mobile parallel-probe storage applications
- Mark A. Lantz
- Hugo E. Rothuizen
- et al.
- 2007
- JMEMS
Paper
Publications
28 results at JMEMS
Sea-of-Leads MEMS I/O interconnects for low-k IC packaging
- Bing Dang
- Muhannad S. Bakir
- et al.
- 2006
- JMEMS
PaperWafer-scale microdevice transfer/interconnect: Its application in an AFM-based data-storage system
- Michel Despont
- Ute Drechsler
- et al.
- 2004
- JMEMS
PaperDesign of atomic force microscope cantilevers for combined thermomechanical writing and thermal reading in array operation
- William P. King
- Thomas W. Kenny
- et al.
- 2002
- JMEMS
PaperMicrofabricated silicon solid immersion lens
- Daniel A. Fletcher
- Kenneth B. Crozier
- et al.
- 2001
- JMEMS
PaperA hermetic glass-silicon package formed using localized aluminum/silicon-glass bonding
- Yu-Ting Cheng
- Liwei Lin
- et al.
- 2001
- JMEMS
PaperUniversal electromagnetic microactuator using magnetic interconnection concepts
- Daniel J. Sadler
- Trifon M. Liakopoulos
- et al.
- 2000
- JMEMS
PaperAnalysis of partly corrugated rectangular diaphragms using the Rayleigh-Ritz method
- Byung Chai Lee
- Eun Sok Kim
- 2000
- JMEMS
PaperQuality factors in micron- and submicron-thick cantilevers
- Kevin Y. Yasumura
- Timothy D. Stowe
- et al.
- 2000
- JMEMS
PaperAir-bearing sliders and plane-plane-concave tips for atomic force microscope cantilevers
- Robert P. Ried
- Jonathan Mamin
- et al.
- 2000
- JMEMS
Paper