Publications

20 results at ECS J. Solid State Sci. Technol.

A study on the electrodeposition and silicidation of Nickel-Cobalt alloys for silicon photovoltaic cell metallization
- - Qiang Huang
- 2015
- ECS J. Solid State Sci. Technol.
Light assisted electrodeposition and silicidation of Ni for silicon photovoltaic cell metallization
- - Qiang Huang
  - Satyavolu S. Papa Rao
  - et al.
- 2015
- ECS J. Solid State Sci. Technol.
Microreplicated conditioners for Cu barrier chemical-mechanical planarization (CMP)
- - Wei-Tsu Tseng
  - Sana Rafie
  - et al.
- 2015
- ECS J. Solid State Sci. Technol.
Challenges of tailoring surface chemistry and plasma/surface interactions to advance atomic layer etching
- - Sebastian U. Engelmann
  - Robert L. Bruce
  - et al.
- 2015
- ECS J. Solid State Sci. Technol.
Electrical enhancement and higher-k engineering in ultra-thin atomic layer deposited Hf_1-xAl_xO_y films
- - K. Tapily
  - S. Consiglio
  - et al.
- 2014
- ECS J. Solid State Sci. Technol.
Toward successful integration of porous low-k materials: Strategies addressing plasma damage
- - Krystelle Lionti
  - Willi Volksen
  - et al.
- 2014
- ECS J. Solid State Sci. Technol.
Ga⁴⁶Sb⁵⁴ material for fast switching and Pb-Free soldering reflow process complying phase-change memory
- - Huai-Yu Cheng
  - Simone Raoux
  - et al.
- 2014
- ECS J. Solid State Sci. Technol.
Post cu cmp cleaning of polyurethane pad debris
- - Wei-Tsu Tseng
  - Elliott Rill
  - et al.
- 2013
- ECS J. Solid State Sci. Technol.
CVD and ALD Co(W) films using amidinato precursors as a single-layered barrier/liner for next-generation Cu-interconnects
- - Hideharu Shimizu
  - Yudai Suzuki
  - et al.
- 2013
- ECS J. Solid State Sci. Technol.
Integration of a manufacturing grade, k = 2.0 spin-on material in a single damascene structure
- - Willi Volksen
  - Sampath Purushothaman
  - et al.
- 2012
- ECS J. Solid State Sci. Technol.