Relevance of remote scattering in gate to channel mobility of thin-oxide CMOS devicesPaul M. SolomonMin Yang2004IEDM 2004
Successful dual damascene integration of extreme low k materials (k < 2.0) using a novel gap fill based integration schemeS.V. NittaS. Purushothamanet al.2004IEDM 2004
Simulation study of Ge n-channel 7.5 nm DGFETs of arbitrary crystallographic alignmentS.E. Laux2004IEDM 2004
Ultra-fast measurements of the inversion charge in MOSFETs and impact on measured mobility in high-k MOSFETsD. SinghP. Solomonet al.2004IEDM 2004
Selectively formed high mobility strained Ge PMOSFETs for high performance CMOSHulling ShangJack O. Chuet al.2004IEDM 2004
High performance and low power transistors integrated in 65nm bulk CMOS technologyZ. LuoA. Steegenet al.2004IEDM 2004
SiGe HBT technology with f max/f T = 350/300 GHz and gate delay below 3.3 psM. KhaterJ.-S. Riehet al.2004IEDM 2004