Effects of underlayer on performance of bilayer resists for 248-nm lithography
- Katherina Babich
- Alessandro Callegari
- et al.
- 1998
- Microlithography 1998
Publications
3593 results for Mathematical Sciences
DUV stability of carbon films for attenuated phase shift mask applications
- Alessandro Callegari
- Katherina Babich
- et al.
- 1998
- SPIE Advanced Lithography 1998
Probabilistic model for the mechanism of phenolic polymer dissolution
- Lewis W. Flanagin
- Christopher L. McAdams
- et al.
- 1998
- Microlithography 1998
Results of attacks on a claimed robust digital image watermark
- Gordon W. Braudaway
- 1998
- SPIE Photonics West 1998
Mixing of 28-THz CO2-laser radiation by nanometer thin film Ni-NiO-Ni diodes with difference frequencies up to 176 GHz
- C. Fumeaux
- Fritz K. Kneubühl
- et al.
- 1998
- Proceedings of SPIE - The International Society for Optical Engineering
Optimizing the holographic digital data storage channel
- G.W. Burr
- Jonathan Ashley
- et al.
- 1998
- Conference on Advanced Optical Memories and Interfaces to Computer Storage 1998
Influence of charge carrier injection on the device performance of blue organic light-emitting diodes
- Heike Riel
- Horst Vestweber
- et al.
- 1998
- Proceedings of SPIE 1998
On the properties of capacity regions in multi-user networks
- J. Thomas
- 1998
- ISIT 1998
Prequential and cross-validated mixture regression estimation
- D.S. Modha
- E. Masry
- 1998
- ISIT 1998
Multi-dimensional Filter Banks and Wavelets - A System Theoretic Perspective
- Sankar Basu
- 1998
- Journal of the Franklin Institute