Slope control of molybdenum lines etched with reactive ion etching
- Yue Kuo
- J.R. Crowe
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
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Properties of W-N and Mo-N films prepared by reactive sputtering
- K.K. Shih
- D.B. Dove
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Composition and structure of boron nitride films deposited by chemical vapor deposition from borazine
- J. Kouvetakis
- V.V. Patel
- et al.
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
In situ plasma contamination measurements by HeNe laser light scattering: A case study
- J.S. Mckillop
- Kurt L. Haller
- et al.
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Surface diffractometry and lattice imaging of scanning tunneling microscopy images
- J.E. Demuth
- R.J. Hamers
- et al.
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Dynamics of the interaction of ethane with lr(110)-(1 x2)
- W.H. Weinberg
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
X-ray reflectivity study of Si02on Si
- A.A. Bright
- G.W. Rubioff
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Si2Cl6and Si2H6adsorption on CaF2/Si(111)
- L.J. Terminello
- F.J. Himpsel
- et al.
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
The effect of solvent absorption on the electrical and dielectric properties of polyimide films
- D.Y. Shih
- J. Cataldo
- et al.
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Surface photovoltage on Si(111)-(7x7) probed by optically pumped scanning tunneling microscopy
- R.J. Hamers
- K. Markert
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films