Publications

176 results at JVSTA

Plasma etching of niobium with CF₄/O₂ gases
- - Mao-Min Chen
  - Run Han Wang
- 1983
- JVSTA
Paper
Chemical bonding and reactions at Ti/Si and Ti/oxygen/Si interfaces
- - R. Blitz
  - G.W. Rubloff
  - et al.
- 1983
- JVSTA
Paper
Preparation of Pb-Bi film by alloy evaporation II. Microstructure and morphology
- - H.-C.W. Huang
  - C.M. Serrano
- 1983
- JVSTA
Paper
Importance of chain reactions in the plasma deposition of hydrogenated amorphous silicon
- - Ivan Haller
- 1983
- JVSTA
Paper
Effect of surface chemistry and work function in secondary ion mass spectrometry
- - Ming L. Yu
- 1983
- JVSTA
Paper
Summary Abstract: Developments in broad-beam ion source technology and applications
- - H.R. Kaufman
  - J.J. Cuomo
- 1983
- JVSTA
Paper