X-ray photoemission and Raman scattering spectroscopic study of surface modifications of silicon induced by electron cyclotron resonance etching
- A.S. Yapsir
- G.S. Oehrlein
- et al.
- 1990
- Applied Physics Letters
Paper
Publications
2351 results at Applied Physics Letters
Photobleaching of light-induced paramagnetic defects in amorphous silicon nitride films
- M.S. Crowder
- E.D. Tober
- et al.
- 1990
- Applied Physics Letters
PaperProximity effect in electron beam patterned x-ray masks
- C.P. Umbach
- A.N. Broers
- 1990
- Applied Physics Letters
PaperExponential thermal emission transients from DX centers in heavily Si-doped GaAs
- E. Calleja
- P.M. Mooney
- et al.
- 1990
- Applied Physics Letters
PaperTemperature dependence of the electronic coherence of GaAs-GaAlAs superlattices
- E. Mendez
- F. Agulló-Rueda
- et al.
- 1990
- Applied Physics Letters
PaperComparison of the selective adsorption and reactivity behavior of WF 6 and TaF5 on SiO2 and polyimide surfaces
- F.R. McFeely
- L.J. Terminello
- et al.
- 1990
- Applied Physics Letters
PaperRadiative recombination in surface-free n+/n-/n +GaAs homostructures
- L.M. Smith
- D.J. Wolford
- et al.
- 1990
- Applied Physics Letters
PaperPicosecond photoluminescence excitation spectroscopy of GaAs/AlGaAs quantum wells
- M.R. Freeman
- D.D. Awschalom
- et al.
- 1990
- Applied Physics Letters
PaperConductance statistics of small-area ohmic contacts on GaAs
- N. Blanc
- P. Guéret
- et al.
- 1990
- Applied Physics Letters
PaperMapping of local temperatures on mirrors of GaAs/AlGaAs laser diodes
- Hans Brugger
- Peter W. Epperlein
- 1990
- Applied Physics Letters
Paper