Novel Si-based composite thin films for 193/157 nm attenuated phase shift mask(APSM) applications
- S. Jay Chey
- C.R. Guarnieri
- et al.
- 2001
- Proceedings of SPIE - The International Society for Optical Engineering
Paper
Publications
3605 results for Mathematical Sciences
Time-space tradeoffs for branching programs
- Paul Beame
- T.S. Jayram
- et al.
- 2001
- Journal of Computer and System Sciences
PaperPseudospectra analysis, nonlinear eigenvalue problems, and studying linear systems with delays
- J. Cullum
- A.E. Ruehli
- 2001
- BIT Numerical Mathematics
PaperLayout and language: An efficient algorithm for detecting text blocks based on spatial and linguistic evidence
- Matthew Hurst
- 2001
- Proceedings of SPIE - The International Society for Optical Engineering
PaperUniquely restricted matchings
- Martin C. Golumbic
- T. Hirst
- et al.
- 2001
- Algorithmica (New York)
PaperProgress in read-write fast-access volume holographic data storage
- Geoffrey W. Burr
- Erwin Mecher
- et al.
- 2001
- Proceedings of SPIE - The International Society for Optical Engineering
PaperCircular dielectric gratings acting as resonators for solid state polymer lasers
- C. Bauer
- H. Giessen
- et al.
- 2001
- Proceedings of SPIE - The International Society for Optical Engineering
PaperWhen is bilayer thin-film imaging suitable: Comparison with single layer resists
- Scott Halle
- Alan Thomas
- et al.
- 2001
- Proceedings of SPIE - The International Society for Optical Engineering
PaperOn String Replacement Exponentiation
- L.J. O'Connor
- 2001
- Designs, Codes, and Cryptography
PaperUse of KRS-XE positive chemically amplified resist for optical mask manufacturing
- Brian Ashe
- Christina Deverich
- et al.
- 2001
- Proceedings of SPIE - The International Society for Optical Engineering
Paper