A comparison of C54-TiSi2 formation in blanket and submicron gate structures using in situ x-ray diffraction during rapid thermal annealing
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3552 results for Materials Discovery
Use of high temperature and high humidity to test the adhesion of sputtered copper to a polyimide surface modified by an ac nitrogen glow discharge
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- Journal of Adhesion Science and Technology
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- S.F. Alvarado
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- Materials Science and Engineering B
PaperCompositional and Electrical Properties of Si Metal-Oxide-Semiconductor Structure Prepared by Direct Photoenhanced Chemical Vapor Deposition using a Deuterium Lamp
- E. Machler
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- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperElectrical transport properties of hot electrons at metal, insulator, and semiconductor interfaces
- R. Ludeke
- A. Bauer
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- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
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- Surface Science
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- Thin Solid Films
PaperMonte Carlo investigation of head-tail ordering of CO monolayers on graphite
- D. Marx
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- 1994
- Surface Science
PaperSi ALE using chlorine/hydrogen exchange. Fundamentals and films
- D.D. Koleske
- S. Gates
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- Applied Surface Science
PaperScanning tunneling microscopy and spectroscopy of arsenic antisite defects in GaAs
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