Image collapse issues in photoresist
- John Simons
- Dario Goldfarb
- et al.
- 2001
- Proceedings of SPIE - The International Society for Optical Engineering
Paper
Publications
3611 results for Mathematical Sciences
Characterization of thin and ultrathin polymer and resist films
- Dario L. Goldfarb
- Qinhuang Lin
- et al.
- 2001
- Proceedings of SPIE - The International Society for Optical Engineering
PaperFeature-shape and line-edge roughness measurement of deep sub-micron lithographic structures using small-angle neutron scattering
- Eric K. Lin
- Wen-li Wu
- et al.
- 2001
- Proceedings of SPIE - The International Society for Optical Engineering
PaperAutomated search method for AFM and profilers
- Michael Ray
- Yves C. Martin
- 2001
- Proceedings of SPIE - The International Society for Optical Engineering
PaperTunable anti-reflective coatings with built-in hard mask properties facilitating thin resist processing
- Arpan P. Mahorowala
- Katherina Babich
- et al.
- 2001
- Proceedings of SPIE - The International Society for Optical Engineering
PaperA high performance E-beam resist coupling excellent dry etch resistance and sub 100nm resolution for advanced mask and device making
- Wu-Song Huang
- Ranee Kwong
- et al.
- 2001
- Proceedings of SPIE - The International Society for Optical Engineering
PaperDynamics of non-ergodic piecewise affine maps of the torus
- Roy Adler
- Bruce Kitchens
- et al.
- 2001
- Ergodic Theory and Dynamical Systems
PaperLattice Attacks on Digital Signature Schemes
- N.A. Howgrave-Graham
- N.P. Smart
- 2001
- Designs, Codes, and Cryptography
PaperWavelets and their applications in industry
- M. Kobayashi
- 2001
- Nonlinear Analysis, Theory, Methods and Applications
Conference paperCombinatorial device fabrication and optimization of multilayer organic LEDs
- Tilman A. Beierlein
- Hans-Peter Ott
- et al.
- 2001
- Proceedings of SPIE 2001
Conference paper