Publications

176 results at JVSTA

Vacuum systems for microelectronics
- - John F. O’hanlon
- 1983
- JVSTA
Summary Abstract: Developments in broad-beam ion source technology and applications
- - H.R. Kaufman
  - J.J. Cuomo
- 1983
- JVSTA
Plasma etching of niobium with CF₄/O₂ gases
- - Mao-Min Chen
  - Run Han Wang
- 1983
- JVSTA
Patterning of poly-para-xylylenes by reactive ion etching
- - J.T.C. Yeh
  - K.R. Grebe
- 1983
- JVSTA
Fine-grained base electrode process for Pb-alloy Josephson technology
- - A.A. Bright
  - S. Klepner
- 1983
- JVSTA
Schottky barrier formation at Pd, Pt, and Ni/Si(111) interfaces
- - R.J. Purtell
  - G. Hollinger
  - et al.
- 1983
- JVSTA
Summary Abstract: Preparation and properties of granular aluminum in plasma-polymerized matrices
- - M. Hecq
  - P. Zieman
  - et al.
- 1983
- JVSTA
Preparation of Pb-Bi film by alloy evaporation II. Microstructure and morphology
- - H.-C.W. Huang
  - C.M. Serrano
- 1983
- JVSTA
Importance of chain reactions in the plasma deposition of hydrogenated amorphous silicon
- - Ivan Haller
- 1983
- JVSTA
Oxygen chemisorption and oxide formation on Si(111) and Si(100) surfaces
- - G. Hollinger
  - F.J. Himpsel
- 1983
- JVSTA