Interaction Between ti and SiO2
- C.-Y. Ting
- M. Wittmer
- et al.
- 2019
- JES
Publications
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509 results at JES
Optimization of Electrodeposit Uniformity by the Use of Auxiliary Electrodes
- S. Mehdizadeh
- J. Dukovic
- et al.
- 2019
- JES
Diffusion of Ion-Implanted Arsenic in Thermally Grown SiO2Films
- D.R. Young
- H. Kräutle
- et al.
- 2019
- JES
Short Time Annealing of Coevaporated Tungsten Silicide Films
- T.O. Sedgwick
- F.M. d'Heurle
- et al.
- 2019
- JES
Determination of partial currents for cuni and cuco electrodeposition using rotating ring-disk electrodes
- Jean Horkans
- I-Chia Hsu Chang
- et al.
- 2019
- JES
Low Energy X-Ray and Electron Damage to IGFET Gate Insulators
- C.J. Merz
- J.R. Maldonado
- et al.
- 2019
- JES
Oxidation Phenomena of Polysilicon/Tungsten Silicide Structures
- L. Nesbit
- 2019
- JES
The Use of Gas Monitors to Characterize a Low-Temperature Atmospheric-Pressure Epitaxial System
- Paul D. Agnello
- Thomas O. Sedgwick
- 2019
- JES
Feature-Size Dependence of Etch Rate in Reactive Ion Etching
- Young H. Lee
- Zhen H. Zhou
- 2019
- JES
XPS Studies on Emersed Silver Electrodes: Coverage and Bonding State of Specifically Adsorbed Chloride
- Wolfgang Kautek
- Joseph G. Gordon
- 2019
- JES