The chemical vapor deposition of copper and copper alloys
- Pascal Doppelt
- Thomas H. Baum
- 1995
- Thin Solid Films
Publications
3530 results for Materials Discovery
UV laser deposition of thin films at 248 NM for phase shifting mask repair
- Janos Farkas
- P.B. Comita
- et al.
- 1994
- MRS Fall Meeting 1994
Electron beam microcolumn for multi-beam applications
- E. Kratschmer
- H.S. Kim
- et al.
- 1995
- IVMC 1995
Directional sputter deposition for semiconductor applications
- S.M. Rossnagel
- 1994
- MRS Fall Meeting 1994
In situ analysis of the formation of thin TiSi2 (<50 nm) contacts in submicron CMOS structures during rapid thermal annealing
- L. Clevenger
- C. Cabral Jr.
- et al.
- 1995
- MRS Fall Meeting 1995
Light scattering measurement of surface topography during formation of titanium silicide
- C. Lavoie
- C. Cabral Jr.
- et al.
- 1995
- MRS Fall Meeting 1995
Options and choices in the disposition of excess weapon plutonium
- R.L. Garwin
- 1995
- MRS Fall Meeting 1995
Synthesis of oligomeric p-phenyleneimine by self-condensation reaction of a novel monomer
- A. Afzali
- J. Gelorme
- 1995
- MRS Fall Meeting 1995
Parallel simulations of rapid fracture
- F.F. Abraham
- 1995
- MRS Fall Meeting 1995
Theoretical considerations about phase growth and phase formation
- F.M. D'Heurle
- 1995
- MRS Fall Meeting 1995