Selective deposition of silicon by plasma-enhanced chemical vapor deposition using pulsed silane flow
- G.N. Parsons
- 1991
- Applied Physics Letters
Publications
2351 results at Applied Physics Letters
Raman microprobe study of narrow InxGa1-xAs stripes on patterned GaAs(100) substrates
- W.C. Tang
- H. Rosen
- et al.
- 1991
- Applied Physics Letters
Centroid shift of γ rays from positron annihilation in the depletion region of metal-oxide-semiconductor structures
- T.C. Leung
- Y. Kong
- et al.
- 1991
- Applied Physics Letters
Multilevel YBaCuO flux transformers with high Tc SQUIDs: A prototype high Tc SQUID magnetometer working at 77 K
- B. Oh
- R.H. Koch
- et al.
- 1991
- Applied Physics Letters
Formation of highly n-doped gallium arsenide layers by rapid thermal oxidation followed by rapid thermal annealing of silicon-capped gallium arsenide
- D.K. Sadana
- J.P. De Souza
- et al.
- 1991
- Applied Physics Letters
Low-temperature electron spin resonance investigations of silicon paramagnetic defects in silicon nitride
- W.L. Warren
- F.C. Rong
- et al.
- 1991
- Applied Physics Letters
Silicon Mach-Zehnder waveguide interferometers based on the plasma dispersion effect
- G.V. Treyz
- P.G. May
- et al.
- 1991
- Applied Physics Letters
Thermodynamics of facet damage in cleaved AlGaAs lasers
- A. Moser
- 1991
- Applied Physics Letters
Grazing angle optical emission interferometry for end-point detection
- David Angell
- Gottlieb S. Oehrlein
- 1991
- Applied Physics Letters
Sub-μm, planarized, Nb-AlOx-Nb Josephson process for 125 mm wafers developed in partnership with Si technology
- M.B. Ketchen
- D.J. Pearson
- et al.
- 1991
- Applied Physics Letters