Rastered laser light scattering studies during plasma processing: Particle contamination trapping phenomena
- Gary S. Selwyn
- J. Heidenreich
- et al.
- 1991
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Paper
Publications
358 results at Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Two-dimensional imaging of photofragments and species desorbed from surfaces: Energy and angle resolved studies
- T.J. Chuang
- R. Schwarzwald
- et al.
- 1991
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperX-ray photoelectron spectroscopy of oxygen adsorbates on Al(111): Theory experiment
- P.S. Baqus
- F. Parmiqiani
- et al.
- 1991
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperThe effects of substrate potentials on electron cyclotron resonance plasmas
- S.M. Rossnagel
- S.J. Whitehair
- et al.
- 1991
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperThe polarization dependence of Bi-induced surface states on GaAs(110)
- A.B. McLean
- R. Ludeke
- et al.
- 1991
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperImages of a microelectronic device with the X1-SPEM, a first generation scanning photoemission microscope at the National Synchrotron Light Source
- H. Ade
- J. Kirz
- et al.
- 1991
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperThermal stress-induced and electromigration-induced void-open failures in Al and Al-Cu fine lines
- T. Kwok
- K.K. Chan
- et al.
- 1991
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperDeposition of (100) Au, Ag, Pd, Pt, and Fe on (100) Si using different metal seed layers
- Chin-An Chang
- 1991
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperThe effects of substrate bias on plasma parameters in an electron cyclotron resonance plasma reactor
- John B.O. Caughman
- William M. Holber
- 1991
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperCorrelation of interface chemistry, barrier height, and step density for Al on vicinal GaAs(100) surfaces
- S. Chang
- I.M. Vitomirov
- et al.
- 1991
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Paper