Formation of Cu3Si and its catalytic effect on silicon oxidation at room temperature
- L. Stolt
- A. Charai
- et al.
- 1991
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Publications
358 results at Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Ion-beam sputtered diamond-like carbon with densities of 2.9 g/cc
- Jerome J. Cuomo
- John Bruley
- et al.
- 1991
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Relation of thickness and some physical properties of NiFe thin films
- R.M. Valletta
- G. Guthmiller
- et al.
- 1991
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Alkali metal chains on the GaAs(110) surface
- Inder P. Batra
- C.Y. Fong
- 1991
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Surface etching and roughening in integrated processing of thermal oxides
- M. Offenberg
- M. liehr
- et al.
- 1991
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Characterization of epitaxial thin films by x-ray diffraction
- Armin Segmuller
- 1991
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Oxygen induced adhesion degradation at metai/polyimide interface
- Da-Yuan Shih
- Nancy Klymko
- et al.
- 1991
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Ballistic electron emission spectroscopy of noble metai-gap(110) interfaces
- R. Ludeke
- M. Prietsch
- 1991
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Cracking and delamination of coatings
- Sinjiroo Thouless
- 1991
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Studies of adhesion of metal films to polyimide
- David L. Pappas
- Jerome J. Cuomo
- et al.
- 1991
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films