Chemistry of fluorine in the oxidation of silicon
- S.R. Kasi
- M. Liehr
- et al.
- 1991
- Applied Physics Letters
Publications
2351 results at Applied Physics Letters
Magnetic ordering in TbxFe1-x amorphous films: An application of x-ray dichroism with linearly polarized light
- Maurizio Sacchi
- Ronald J. H. Kappert
- et al.
- 1991
- Applied Physics Letters
Magneto-optical recording by short pulses
- T. Ohtsuki
- S. Owa
- et al.
- 1991
- Applied Physics Letters
Hydrocarbon reaction with HF-cleaned Si(100) and effects on metal-oxide-semiconductor device quality
- S.R. Kasi
- M. Liehr
- et al.
- 1991
- Applied Physics Letters
Diffusion versus oxidation rates in silicon-germanium alloys
- J. Eugène
- F.K. LeGoues
- et al.
- 1991
- Applied Physics Letters
Low-rate plasma oxidation of Si in a dilute oxygen/helium plasma for low-temperature gate quality Si/SiO2 interfaces
- A.A. Bright
- J. Batey
- et al.
- 1991
- Applied Physics Letters
Interactive effects in the reactive ion etching of SiGe alloys
- G.S. Oehrlein
- Y. Zhang
- et al.
- 1991
- Applied Physics Letters
Unusually low resistivity of copper germanide thin films formed at low temperatures
- L. Krusin-Elbaum
- M.O. Aboelfotoh
- 1991
- Applied Physics Letters
Flexural resonant samples for submonolayer measurements of oxygen on Si surfaces
- Russell W. Dreyfus
- 1991
- Applied Physics Letters
Threshold and saturation effects for photosignals in an amorphous silicon waveguide structure
- M. Zelikson
- K. Weiser
- et al.
- 1991
- Applied Physics Letters