Kinetics of nucleation and growth of Si on SiO2 in very low pressure SiH4 chemical vapor deposition
- S.S. Dana
- M. Liehr
- et al.
- 1992
- Applied Physics Letters
Publications
2351 results at Applied Physics Letters
Electrical profiling of Si(001) p-n junctions by scanning tunneling microscopy
- E.T. Yu
- M. Johnson
- et al.
- 1992
- Applied Physics Letters
Scanning probe microscopy of thermal conductivity and subsurface properties
- M. Nonnenmacher
- H.K. Wickramasinghe
- 1992
- Applied Physics Letters
Reactive ion etch damages in inverted, trilayer thin-film transistor
- Yue Kuo
- 1992
- Applied Physics Letters
Formation of two-dimensional arsenic-precipitate arrays in GaAs
- M.R. Melloch
- N. Otsuka
- et al.
- 1992
- Applied Physics Letters
Ion-induced fluorination in electron cyclotron resonance etching of silicon studied by x-ray photoelectron spectroscopy
- David Vender
- Marco Haverlag
- et al.
- 1992
- Applied Physics Letters
Evaporated CoPt alloy films with strong perpendicular magnetic anisotropy
- C.-J. Lin
- G. Gorman
- 1992
- Applied Physics Letters
Degradation and breakdown of silicon dioxide films on silicon
- D.J. Dimaria
- D. Arnold
- et al.
- 1992
- Applied Physics Letters
Ellipsometric study of silicon surface damage in electron cyclotron resonance plasma etching using CF4 and SF6
- M. Haverlag
- D. Vender
- et al.
- 1992
- Applied Physics Letters
Imaging performance of multilayer x-ray mirrors
- Eberhard Spiller
- Janusz Wilczynski
- et al.
- 1992
- Applied Physics Letters