Comparison of secondary ion mass spectrometry profiling of sub-100 nm ultrashallow junctions using NO+2 and O+2 sputtering
- P.A. Ronsheim
- K.L. Lee
- 1998
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
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26865 results for Science
A history of the IBM systems journal
- George C. Stierhoff
- Alfred G. Davis
- 1998
- Annals of the History of Computing
ReviewFEOL technology trend
- Yuan Taur
- Tak H. Ning
- 1998
- Materials Chemistry and Physics
ReviewNanometer thin-film Ni-NiO-Ni diodes for detection and mixing of 30 THz radiation
- C. Fumeaux
- W. Herrmann
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- 1998
- Infrared Physics and Technology
ReviewThe history of Fortran I, II, and III
- John Backus
- 1998
- Annals of the History of Computing
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- C.-K. Hu
- J.M.E. Harper
- 1998
- Materials Chemistry and Physics
ReviewDirectional and ionized physical vapor deposition for microelectronics applications
- S.M. Rossnagel
- 1998
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
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- G. Deconinck
- J. Vounckx
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- International Journal of Modelling and Simulation
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- J.P. Gambino
- E.G. Colgan
- 1998
- Materials Chemistry and Physics
ReviewDensity-Functional Theory and Molecular Dynamics: A New Perspective for Simulations of Biological Systems
- Wanda Andreoni
- 1998
- Perspectives in Drug Discovery and Design
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