Collimated sputtering of TiN/Ti liners into sub-half-micrometer high aspect ratio contacts/lines
- R.V. Joshi
- S.B. Brodsky
- 1992
- Applied Physics Letters
Paper
Publications
2351 results at Applied Physics Letters
In0.35Ga0.65P light-emitting diodes grown by gas-source molecular beam epitaxy
- W. Ted Masselink
- Martin Zachau
- 1992
- Applied Physics Letters
PaperPrecursors for Si atomic layer epitaxy: Real time adsorption studies on Si(100)
- D.D. Koleske
- S. Gates
- et al.
- 1992
- Applied Physics Letters
PaperImaging performance of multilayer x-ray mirrors
- Eberhard Spiller
- Janusz Wilczynski
- et al.
- 1992
- Applied Physics Letters
PaperEnhanced electro-optic effect in amorphous hydrogenated silicon based waveguides
- M. Zelikson
- J. Salzman
- et al.
- 1992
- Applied Physics Letters
PaperSelective growth of Si/SiGe resonant tunneling diodes by atmospheric pressure chemical vapor deposition
- A. Zaslavsky
- D.A. Grützmacher
- et al.
- 1992
- Applied Physics Letters
PaperSilicon epitaxy from silane by atmospheric-pressure chemical vapor deposition at low temperatures
- P. Agnello
- T.O. Sedgwick
- et al.
- 1992
- Applied Physics Letters
PaperDramatic enhancement of interlayer exchange coupling and giant magnetoresistance in Ni81Fe19/Cu multilayers by addition of thin Co interface layers
- S.S.P. Parkin
- 1992
- Applied Physics Letters
PaperScanning tunneling microscopy and spectroscopy of Si/SiGe(001) superlattices
- E.T. Yu
- J.-M. Halbout
- et al.
- 1992
- Applied Physics Letters
PaperPhotoreflectance characterization of an InP/InGaAs heterojunction bipolar transistor structure
- D. Yan
- Fred H. Pollak
- et al.
- 1992
- Applied Physics Letters
Paper