Shape slack: A design-manufacturing co-optimization methodology using tolerance information
- Shayak Banerjee
- Kanak B. Agarwal
- et al.
- 2013
- J. Micro/Nanolithogr. MEMS MOEMS
Paper
Publications
14467 results for Physical Sciences
Characterization of wafer geometry and overlay error on silicon wafers with nonuniform stress
- Timothy A. Brunner
- Vinayan C. Menon
- et al.
- 2013
- Journal of Micro/Nanolithography, MEMS, and MOEMS
PaperPattern transfer of directed self-assembly patterns for CMOS device applications
- Hsin-Yu Tsai
- Hiroyuki Miyazoe
- et al.
- 2013
- J. Micro/Nanolithogr. MEMS MOEMS
PaperIntelligent bipolar control of MEMS capacitive switches
- Guanghai Ding
- David Molinero
- et al.
- 2013
- IEEE T-MTT
PaperCalibration-kit design for millimeter-wave silicon integrated circuits
- Dylan F. Williams
- Phillip Corson
- et al.
- 2013
- IEEE T-MTT
PaperMethods for joint optimization of mask and design targets for improving lithographic process window
- Shayak Banerjee
- Kanak B. Agarwal
- et al.
- 2013
- J. Micro/Nanolithogr. MEMS MOEMS
PaperImplications of CO2 contamination in rechargeable nonaqueous Li-O2 batteries
- Sanketh R. Gowda
- A. Brunet
- et al.
- 2012
- Journal of Physical Chemistry Letters
PaperNanoscale thermomechanics of wear-resilient polymeric bilayer systems
- Tassilo Kaule
- Yi Zhang
- et al.
- 2012
- ACS Nano
PaperHow input fluctuations reshape the dynamics of a biological switching system
- Bo Hu
- David A. Kessler
- et al.
- 2012
- Physical Review E - SNSMP
PaperExtremely flexible nanoscale ultrathin body silicon integrated circuits on plastic
- Davood Shahrjerdi
- Stephen W. Bedell
- 2012
- Nano Letters
Paper