Publications

509 results at JES

Plasma Etching of Silicon in SF₆: Experimental and Reactor Modeling Studies
- - Yeong-Jyh Lii
  - Jacob Jorné
  - et al.
- 2019
- JES
Paper
Low Energy Proton Beam Lithography with a Thin Oxygen-Etch Barrier Layer
- - H. Hiraoka
- 2019
- JES
Paper
Electrical studies on annealed d2 plasma-exposed silicon
- - A. Henry
  - O.O. Awadelkarim
  - et al.
- 2019
- JES
Paper
In Situ X-Ray Absorption Study of Chromium Valency Changes in Passive Oxides on Sputtered ALC_r Thin Films Under Electrochemical Control
- - A.J. Davenport
  - H.S. Isaacs
  - et al.
- 2019
- JES
Paper
Phosphorus-Doped Polycrystalline Silicon via LPCVD: I. Process Characterization
- - B.S. Meyerson
  - W.L. Olbricht
- 2019
- JES
Paper
Transpassive Dissolution of 420 Stainless Steel in Concentrated Acids under Electropolishing Conditions
- - M. Datta
  - D. Vercruysse
- 2019
- JES
Paper
Initiation of electroless copper plating using Pd+2/poly(acrylic acid) films
- - Robert L. Jackson
- 2019
- JES
Paper
Growth of Facet-Free Selective Silicon Epitaxy at Low Temperature and Atmospheric Pressure
- - T.O. Sedgwick
  - P. Agnello
  - et al.
- 2019
- JES
Paper
Phosphorus-Doped Polycrystalline Silicon via LPCVD: II. Surface Interactions of the Silane/Phosphine/Silicon System
- - B.S. Meyerson
  - M.L. Yu
- 2019
- JES
Paper
Fundamental Study of Acid Copper Through-Hole Electroplating Process
- - Edward K. Yung
  - Lubomyr T. Romankiw
- 2019
- JES
Paper