Electromigration in two-level interconnect structures with Al alloy lines and W studs
- C.-K. Hu
- P.S. Ho
- et al.
- 1992
- Journal of Applied Physics
Publications
2360 results at Journal of Applied Physics
Characterization of laser vaporization plasmas generated for the deposition of diamond-like carbon
- David L. Pappas
- Katherine L. Saenger
- et al.
- 1992
- Journal of Applied Physics
Application of disjoining and capillary pressure to liquid lubricant films in magnetic recording
- C. Mathew Mate
- 1992
- Journal of Applied Physics
Diffusion barrier properties of TiN films for submicron silicon bipolar technologies
- E. Kobeda
- J. Warnock
- et al.
- 1992
- Journal of Applied Physics
Mechanism and conditions for anomalous strain relaxation in graded thin films and superlattices
- F.K. LeGoues
- B.S. Meyerson
- et al.
- 1992
- Journal of Applied Physics
Crystallization of amorphous Co-Si alloys
- Q.Z. Hong
- K. Barmak
- et al.
- 1992
- Journal of Applied Physics
The effect of the flow of silane on the properties of a-Si:H deposited by concentric-electrode radio frequency glow-discharge
- J.P. Conde
- K.K. Chan
- et al.
- 1992
- Journal of Applied Physics
Deposition of amorphous silicon using a tubular reactor with concentric-electrode confinement
- J.P. Conde
- K.K. Chan
- et al.
- 1992
- Journal of Applied Physics
The role of dislocation-dislocation interactions in the relaxation of pseudomorphically strained semiconductors. II. Experiment-The high-temperature relaxation of ultrahigh-vacuum chemical-vapor-deposited SiGe thin films
- S. Stiffler
- Carol Stanis
- et al.
- 1992
- Journal of Applied Physics
Pyrolysis and laser ablation of plasma-polymerized fluorocarbon films: Effects of gold particles
- William R. Creasy
- Jeffrey A. Zimmerman
- et al.
- 1992
- Journal of Applied Physics