Flexible access control using IPC redirection
- Trent Jaeger
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- et al.
- 1999
- HotOS 1999
Conference paper
Publications
26855 results for Science
Supporting contract match-making
- Yigal Hoffner
- 1999
- RIDE-VE 1999
Conference paperCrossFlow-cross-organizational workflow support for virtual organizations
- Paul Grefen
- Yigal Hoffner
- 1999
- RIDE-VE 1999
Conference paperA construction of interpolating wavelets on invariant sets
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- 1999
- Mathematics of Computation
PaperApproach to pattern aspect ratio control
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- Franz Zach
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- 1999
- SPIE Advanced Lithography 1999
Conference paperDevelopment of an incremental structural parameter model for predicting reactive ion etch rates of 193 nm photoresist polymers
- Thomas I. Wallow
- P.J. Brock
- et al.
- 1999
- SPIE Advances in Resist Technology and Processing 1999
PaperApproaches to etch resistant 193-nm photoresists: Performance and prospects
- R.D. Allen
- Juliann Opitz
- et al.
- 1999
- SPIE Advances in Resist Technology and Processing 1999
PaperMolecular weight tailoring in methacrylate 193 nm photoresists
- Thomas I. Wallow
- P.J. Brock
- et al.
- 1999
- SPIE Advances in Resist Technology and Processing 1999
Conference paperHot electron emission lithography
- M. Poppeller
- E. Cartier
- et al.
- 1999
- Microlithography 1999
Conference paperAerial image contrast using interferometric lithography: Effect on line-edge roughness
- M.I. Sanchez
- W.D. Hinsberg
- et al.
- 1999
- SPIE Advances in Resist Technology and Processing 1999
Conference paper