Porous organosilicates for on-chip dielectric applications
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- 1999
- MRS Spring Meeting 1999
Paper
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26855 results for Science
Nitrogen implantation and diffusion in silicon
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- MRS Spring Meeting 1999
PaperTransient enhanced diffusion and dose loss of indium in silicon
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- MRS Spring Meeting 1999
PaperLow dielectric constant SiCOH films as potential candidates for interconnect dielectrics
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- 1999
- MRS Spring Meeting 1999
PaperCharacterization of thin dielectric films as copper diffusion barriers using triangular voltage sweep
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- 1999
- MRS Spring Meeting 1999
PaperThe future of silicide for CMOS contacts
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- MRS Spring Meeting 1999
Conference paperCharacterization of plated Cu thin film microstructures
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- MRS Spring Meeting 1999
Conference paperMechanisms for microstructure evolution in electroplated copper thin films
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- 1999
- MRS Spring Meeting 1999
Conference paperClassification of the modes of dissociation in immiscible Cu-alloy thin films
- K. Barmak
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- et al.
- 1999
- MRS Spring Meeting 1999
Conference paperCharacterization of thin dielectric films as copper diffusion barriers using triangular voltage sweep
- S. Cohen
- J.C. Liu
- et al.
- 1999
- MRS Spring Meeting 1999
Conference paper