Surface analysis studies of copper chemical vapor deposition from 1,5-cyclooctadiene-copper(l)-hexafluoroacetylacetonate
- Susan L. Cohen
- Michael Liehr
- et al.
- 1992
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
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358 results at Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Dynamical studies of the interaction of D2 with a Cu(111) surface
- C.T. Rettner
- D.J. Auerbach
- et al.
- 1992
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Conference paperAn isotope approach to characterization of microwave water plasma modified polyimide surfaces
- N.J. Chou
- A.D. Marwick
- et al.
- 1992
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperHelium plasma enhanced chemical vapor deposited oxides and nitrides: Process mechanisms and applications in advanced device structures
- A.A. Bright
- 1991
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperThe use of secondary ion mass spectrometry to investigate copolymer enhanced adhesion between immiscible polymers
- V.R. Deline
- H.R. Brown
- et al.
- 1991
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperCollimated magnetron sputter deposition
- S.M. Rossnagel
- D.J. Mikalsen
- et al.
- 1991
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperTwo-dimensional imaging of photofragments and species desorbed from surfaces: Energy and angle resolved studies
- T.J. Chuang
- R. Schwarzwald
- et al.
- 1991
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperGaas surface oxidation and deoxidation using electron cyclotron resonance oxygen and hydrogen plasmas
- D.V. Podlesnik
- M.T. Schmidt
- et al.
- 1991
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperCharacterization of epitaxial thin films by x-ray diffraction
- Armin Segmuller
- 1991
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperThe effects of substrate potentials on electron cyclotron resonance plasmas
- S.M. Rossnagel
- S.J. Whitehair
- et al.
- 1991
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Paper