Studying membranes with scanning force microscopy and patch-clamp technique
- J. Mosbacher
- W. Häberle
- et al.
- 1996
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Paper
Publications
168 results at Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Ionized physical vapor deposition of Cu for high aspect ratio damascene trench fill applications
- C. Nichols
- S.M. Rossnagel
- et al.
- 1996
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
PaperLow-temperature magnetic resonance force detection
- K. Wago
- O. Züger
- et al.
- 1996
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
PaperElectron-beam microcolumns for lithography and related applications
- T.H.P. Chang
- M.G.R. Thomson
- et al.
- 1996
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
PaperEnergy spread in liquid metal ion sources at low currents
- J.C. Beckman
- T.H.P. Chang
- et al.
- 1996
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
PaperCorrelation of UVIIHS resist chemistry to dissolution rate measurements
- J. Thackeray
- T.H. Fedynyshyn
- et al.
- 1996
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
PaperLiner conformality in ionized magnetron sputter metal deposition processes
- S. Hamaguchi
- S.M. Rossnagel
- 1996
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
PaperStudy of plastic flow in ultrasmall Au contacts
- A. Stalder
- U. Dürig
- 1996
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
PaperThin, high atomic weight refractory film deposition for diffusion barrier, adhesion layer, and seed layer applications
- S.M. Rossnagel
- C. Nichols
- et al.
- 1996
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
PaperAn inquiry concerning the principles of Si 2p core-level photoemission shift assignments at the Si/SiO2 interface
- F.R. McFeely
- 1996
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Paper