High resolution electron beam lithography using ZEP-520 and KRS resists at low voltage
- D.M. Tanenbaum
- C.W. Lo
- et al.
- 1996
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Paper
Publications
168 results at Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Ionized physical vapor deposition of Cu for high aspect ratio damascene trench fill applications
- C. Nichols
- S.M. Rossnagel
- et al.
- 1996
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
PaperLow-temperature magnetic resonance force detection
- K. Wago
- O. Züger
- et al.
- 1996
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
PaperEnergy spread in liquid metal ion sources at low currents
- J.C. Beckman
- T.H.P. Chang
- et al.
- 1996
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
PaperDesign and performance analysis of a three-dimensional sample translation device used in ultrahigh vacuum scanned probe microscopy
- R.R. Schlittler
- J.K. Gimzewski
- 1996
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
PaperCorrelation of UVIIHS resist chemistry to dissolution rate measurements
- J. Thackeray
- T.H. Fedynyshyn
- et al.
- 1996
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
PaperScanning force microscopy in the dynamic mode using microfabricated capacitive sensors
- N. Blanc
- J. Brugger
- et al.
- 1996
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
PaperFabrication of x-ray lithography masks with optical lithography
- D. LaTulipe
- J.R. Maldonado
- et al.
- 1996
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
PaperPredicting in-plane distortion from electron-beam lithography on x-ray mask membranes
- D.L. Laird
- R. Engelstad
- et al.
- 1996
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
PaperStudy of plastic flow in ultrasmall Au contacts
- A. Stalder
- U. Dürig
- 1996
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Paper