Publications

3543 results for Mathematical Sciences

Optimized acid release underlayers for 157 nm lithography
- - Carl E. Larson
  - G.M. Wallraff
  - et al.
- 2004
- Microlithography 2004
Measurements of water distribution in thin lithographic films
- - Bryan D. Vogt
  - Christopher L. Soles
  - et al.
- 2004
- Microlithography 2004
High speed, lateral PIN photodiodes in silicon technologies
- - Jeremy D. Schaub
  - Steven J. Koester
  - et al.
- 2004
- SPIE IOPTO 2004
Taming pattern and focus variation in VLSI design
- - Fook-Luen Heng
  - Puneet Gupta
  - et al.
- 2004
- AMM 2004
Manufacturing-aware design methodologies for mixed-signal communication circuits
- - Juan Antonio Carballo
  - Sani Nassif
- 2004
- AMM 2004
Merits of cellwise model-based OPC
- - Puneet Gupta
  - Fook-Luen Heng
  - et al.
- 2004
- AMM 2004
Modeling for profile-based process-window metrology
- - Christopher P. Ausschnitt
  - Shaunee Y. Cheng
- 2004
- Microlithography 2004
High-performance circuit design for the RET-enabled 65nm technology node
- - Lars Liebmann
  - Arnold Barish
  - et al.
- 2004
- AMM 2004
Image fidelity verification - ContourIFV
- - Ioana Graur
  - Rama N. Singh
  - et al.
- 2004
- AMM 2004
Min-up/min-down polytopes
- - Jon Lee
  - Janny Leung
  - et al.
- 2004
- Discrete Optimization