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- R. Hsiao
- D.C. Miller
- et al.
- 1999
- Applied Surface Science
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Publications
3552 results for Materials Discovery
Interhalogen plasma chemistries for dry etch patterning of Ni, Fe, NiFe and NiFeCo thin films
- H. Cho
- K.B. Jung
- et al.
- 1999
- Applied Surface Science
PaperEnhanced secondary electron yield from oxidized regions on amorphous carbon films studied by x-ray spectromicroscopy
- Javier Diaz
- Simone Anders
- et al.
- 1999
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
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- A. Grill
- C.V. Jahnes
- et al.
- 1999
- Journal of Materials Research
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- Laurent Libioulle
- Alexander Bietsch
- et al.
- 1998
- Langmuir
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- J. Patrick Kampf
- Curtis W. Frank
- et al.
- 1998
- Langmuir
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- George W. Tyndall
- R.J. Waltman
- et al.
- 1998
- Langmuir
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- J.J. Sullivan
- R. Gwizdak
- et al.
- 1998
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperEffects of argon addition to a platinum dry etch process
- K.R. Milkove
- J. Coffin
- et al.
- 1998
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
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- H.J. Wen
- R. Ludeke
- 1998
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
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