The growth of tantalum thin films by plasma-enhanced atomic layer deposition and diffusion barrier properties
- H. Kim
- C. Cabral Jr.
- et al.
- 2002
- MRS Proceedings 2002
Conference paper
Publications
26865 results for Science
A self-aligned silicide process utilizing ion implants for reduced silicon consumption and control of the silicide formation temperature
- G.M. Cohen
- C. Cabral Jr.
- et al.
- 2002
- MRS Proceedings 2002
Conference paperObjects, XML and databases
- Akmal B. Chaudhri
- 2002
- Information and Software Technology
Conference paperMicromagnetic behavior of electrodeposited cylinder arrays
- C.A. Ross
- M. Hwang
- et al.
- 2002
- Physical Review B - CMMP
PaperMagnetic reversal of perpendicularly-biased Co/Pt multilayers
- O. Hellwig
- S. Maat
- et al.
- 2002
- Physical Review B - CMMP
PaperDynamic AFM using the FM technique with constant excitation amplitude
- B. Gotsmann
- H. Fuchs
- 2002
- Applied Surface Science
Conference paperIntercalated organic-inorganic perovskites stabilized by fluoroaryl-aryl interactions
- David B. Mitzi
- David R. Medeiros
- et al.
- 2002
- Inorganic Chemistry
PaperGallium nitride epitaxy on (0001) sapphire
- V. Narayanan
- K. Lorenz
- et al.
- 2002
- Philosophical Magazine A: Physics of Condensed Matter, Structure, Defects and Mechanical Properties
Paper8 Gb/s CMOS compatible monolithically integrated silicon optical receiver
- Sebastian M. Csutak
- Jeremy D. Schaub
- et al.
- 2002
- OFC 2002
Conference paperProduction of crosslinked, hollow nanoparticles by surface-initiated living free-radical polymerization
- Susanne Blomberg
- Sofia Ostberg
- et al.
- 2002
- J Polym Sci Part A
Paper