In-situ studies of silicide formation in Ti-Ta bilayer thin films on poly-Si
- A.S. Özcan
- K.F. Ludwig Jr.
- et al.
- 2002
- MRS Proceedings 2002
Conference paper
Publications
26865 results for Science
Crystallographic texture and phase metrology during damascene copper processing
- K.J. Kozaczek
- P. DeHaven
- et al.
- 2002
- MRS Proceedings 2002
Conference paperCharacteristics of low-k and ultralow-k PECVD deposited SiCOH films
- A. Grill
- V.V. Patel
- et al.
- 2002
- MRS Proceedings 2002
Conference paperTexture and resistivity of Cu and dilute Cu alloy films
- K. Barmak
- A. Gungor
- et al.
- 2002
- MRS Proceedings 2002
Conference paperLow temperature metal organic chemical vapor deposition of aluminum oxide thin films for advanced CMOS gate dielectric applications
- Spyridon Skordas
- Filippos Papadatos
- et al.
- 2002
- MRS Proceedings 2002
Conference paperEvaluation of the chemical-mechanical planarization (CMP) performance of silicon nitride and silicon carbide as hard mask materials for Cu-based interconnect technology
- Wei-Tsu Tseng
- Jia Lee
- et al.
- 2002
- MRS Spring Meeting 2002
Conference paperPyrene fluorescence as a molecular probe of miscibility in organic/inorganic hybrid nanocomposites suitable for microelectronic applications
- Q.R. Huang
- David Mecerreyes
- et al.
- 2002
- MRS Proceedings 2002
Conference paperThe stability of triangular 'droplet' phases on Si(1 1 1)
- J.B. Hannon
- J. Tersoff
- et al.
- 2002
- Journal of Crystal Growth
Conference paperCu and dilute binary Cu(Ti), Cu(Sn) and Cu(Al) thin films: Texture, grain growth and resistivity
- A. Gungor
- K. Barmak
- et al.
- 2002
- MRS Proceedings 2002
Conference paperTerabit density cobalt nanowire arrays with tunable magnetic properties
- Andrei Ursache
- Mustafa Bal
- et al.
- 2002
- MRS Proceedings 2002
Conference paper