Across-wafer nonuniformity of long throw sputter deposition
- A. Mayo
- S. Hamaguchi
- et al.
- 1997
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Paper
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168 results at Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Electromigration behavior of hot-sputtered Al(Cu) versus chemical vapor deposition W vias
- R. Filippi
- E.N. Levine
- et al.
- 1997
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
PaperUltrasonic and dip resist development processes for 50 nm device fabrication
- K.L. Lee
- J. Bucchignano
- et al.
- 1997
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
PaperPerformance of Zr/O/W Schottky emitters at reduced temperatures
- H.S. Kim
- M.L. Yu
- et al.
- 1997
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
PaperConductive polyaniline: Applications in x-ray mask making
- M.S. Lawliss
- J.M. Rocque
- et al.
- 1997
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
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- J.C. Beckman
- T.H.P. Chang
- et al.
- 1997
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
PaperX-ray lithography: Status, challenges, and outlook for 0.13 μm
- Jerome P. Silverman
- 1997
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
PaperEffect of growth conditions on surface roughening of relaxed InGaAs on GaAs
- T. Pinnington
- C. Lavoie
- et al.
- 1997
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
PaperX-ray lithography for ≤100 nm ground rules in complex patterns
- Scott Hector
- Victor Pol
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- 1997
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
PaperNew complimentary metal-oxide semiconductor technology with self-aligned Schottky source/drain and low-resistance T gates
- S. Rishton
- K. Ismail
- et al.
- 1997
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Paper