Characterization of photoresist spatial resolution by interferometric lithography
- John A. Hoffnagle
- William D. Hinsberg
- et al.
- 2003
- Microlithography 2003
Conference paper
Publications
26856 results for Science
Polyelectrolyte effects in model photoresist developer solutions: Roles of base concentration and added salts
- Vivek M. Prabhu
- Ronald L. Jones
- et al.
- 2003
- Microlithography 2003
Conference paperReinforcement learning with immediate rewards and linear hypotheses
- Naoki Abe
- Alan W. Biermann
- et al.
- 2003
- Algorithmica (New York)
PaperA Solid-State Spectral Effect in Eclipsed Tetracyanonickelates: X-ray Crystal Structure, Polarized Specular Reflectance Spectroscopy, and ZINDO Modeling of Sr[Ni(CN)4]·5H2O, Rb 2[Ni(CN)4]·H2O, and Na 2[Ni(CN)4]·3H2O
- Frank R. Fronczek
- Terry J. Delord
- et al.
- 2003
- Inorganic Chemistry
PaperGlobal secondary structure packing angle bias in proteins
- Daniel E. Platt
- Concettina Guerra
- et al.
- 2003
- Proteins: Structure, Function and Genetics
PaperPlasma-enhanced atomic layer deposition of tantalum thin films: The growth and film properties
- H. Kim
- S.M. Rossnagel
- 2003
- Thin Solid Films
PaperA decomposition of classes via clustering to explain and improve Naive Bayes
- Ricardo Vilalta
- Irina Rish
- 2003
- ECML 2003
Conference paperClassification approach towards ranking and sorting problems
- Shyamsundar Rajaram
- Ashutosh Garg
- et al.
- 2003
- ECML 2003
Conference paperTopic learning from few examples
- Huaiyu Zhu
- Shivakumar Vaithyanathan
- et al.
- 2003
- PKDD 2003
Conference paperThe bi-directional electron pump operated in the double dot regime
- T. Altebaeumer
- H. Ahmed
- 2003
- MNE 2003
Conference paper