Applications of image diagnostics to metrology quality assurance and process control
- John A. Allgair
- Victor V. Boksha
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- 2003
- SPIE Advanced Microelectronic Manufacturing 2003
Conference paper
Publications
26858 results for Science
Layout Optimization at the pinnacle of Optical Lithography
- Lars Liebmann
- Greg Northrop
- et al.
- 2003
- SPIE Advanced Microelectronic Manufacturing 2003
Conference paperFailure prediction across process window for robust OPC
- Shumay D. Shang
- Yuri Granik
- et al.
- 2003
- SPIE Advanced Microelectronic Manufacturing 2003
Conference paperPore morphologies in disordered nanoporous thin films
- Jonathan A. Hedstrom
- Michael F. Toney
- et al.
- 2003
- Langmuir
PaperVisual Problem-Solving Support for New Event Triage in Centralized Network Security Monitoring: Challenges, Tools and Benefits
- Markus Stolze
- René Pawlitzek
- et al.
- 2003
- IT-Incident Management & IT-Forensics 2003
Conference paperUltrafine FePt Nanoparticles Prepared by the Chemical Reduction Method
- Kevin E. Elkins
- Tejaswi S. Vedantam
- et al.
- 2003
- Nano Letters
PaperVisualization, Optimization, and Business Strategy: A Case Study
- Donna L. Gresh
- Eugene I. Kelton
- 2003
- VIS 2003
Conference paperPerceptual Color and Spatial Texture Features for Segmentation
- Junqing Chen
- Thrasyvoulos N. Pappas
- et al.
- 2003
- IS&T/SPIE Electronic Imaging 2003
Conference paperApplication of blurring filters to improve detection of invisible image watermarks
- Gordon W. Braudaway
- Fred Mintzer
- 2003
- IS&T/SPIE Electronic Imaging 2003
Conference paperWatching chips work: Optical imaging of hot carriers in ICs
- J.C. Tsang
- 2002
- ECS Meeting 2002
Conference paper