A new approach to pattern metrology
- Christopher P. Ausschnitt
- 2004
- SPIE Advanced Lithography 2004
Conference paper
Publications
26858 results for Science
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- Physical Review B - CMMP
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- Journal of Molecular Biology
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- Bioinformatics
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- 2004
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Paper