Publications

3543 results for Mathematical Sciences

Modeling polarization for Hyper-NA lithography tools and masks
- - Kafai Lai
  - Alan E. Rosenbluth
  - et al.
- 2007
- SPIE Advanced Lithography 2007
Global optimization of masks, including film stack design to restore TM contrast in high NA TCC's
- - Alan E. Rosenbluth
  - David Melville
  - et al.
- 2007
- SPIE Advanced Lithography 2007
Coupling-aware mixed dummy metal insertion for lithography
- - Liang Deng
  - Martin D.F. Wong
  - et al.
- 2007
- SPIE Advanced Lithography 2007
Dark field Double Dipole Lithography (DDL) for back-end-of-line processes
- - M. Burkhardt
  - Sean Burns
  - et al.
- 2007
- SPIE Advanced Lithography 2007
A solid-state 193 nm laser with high spatial coherence for sub-40 nm interferometric immersion lithography
- - Andrew J. Merriam
  - Donald S. Bethune
  - et al.
- 2007
- SPIE Advanced Lithography 2007
Self-aligned, self-assembled organosilicate line patterns of ∼20nm half-pitch from block copolymer mediated self-assembly
- - Ho-Cheol Kim
  - Joy Cheng
  - et al.
- 2007
- SPIE Advanced Lithography 2007
Improving the power-performance of multicore processors through optimization of lithography and thermal processing
- - A. Gabor
  - T.A. Brunner
  - et al.
- 2007
- SPIE Advanced Lithography 2007
High performance 193nm photoresists based on fluorosulfonamide
- - Wenjie Li
  - Kuang-Jung Chen
  - et al.
- 2007
- SPIE Advanced Lithography 2007
Use of starburst patterns in optical lithography
- - M. Burkhardt
  - Cyrus Tabery
- 2007
- SPIE Advanced Lithography 2007
Initial experience establishing a EUV baseline lithography process for manufacturability assessment
- - O.R. Wood II
  - D. Back
  - et al.
- 2007
- SPIE Advanced Lithography 2007